5. Non-machined sensors
These sensors are generally manufactured using conventional microelectronics processes, i.e. using planar
5.1 Temperature sensors
They are widely used in industry, and can exploit a multitude of physical effects. These include changes in the resistance of lightly doped silicon (thermistor effect), variations in the current/voltage characteristic of PN junctions, and thermopiles. Thermistors can be produced by diffusing impurities into a substrate and contacting it with aluminum metallizations, or by a doped semiconductor disk metallized on both sides.
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Non-machined sensors
The effects of sensor miniaturization
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