1. Microsystems by example
Microsystems are compact, miniaturized, multifunctional, collectively-manufactured devices that interact with the non-electrical world via sensors and actuators; they are able to exchange information and communication with the outside world or with other microsystems.
This definition, while perfectly correct, is too general to illustrate the reality. Two examples should be more explicit.
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In 1992, Analog Devices announced the launch of a fully integrated accelerometer on 10 mm2 silicon for automotive shock detection. Figure 2 shows the corresponding integrated circuit. It is an exemplary microsystem, combining sensor, actuator and signal processing. The sensor is a capacitive accelerometer and the actuator uses the...
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Microsystems by example