2. Method classification
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2.1.1 Thermal nanoimprinting
A thin layer of thermoplastic polymer (resin) is first applied to a substrate (sample) using a spinner (see figure
2
). After heating the mold to a temperature above the polymer's glass transition temperature (T
g
), the mold is pressed against the polymer layer with sufficiently high pressure. The system is then...
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Method classification
References
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(1) - RAI-CHOUDHURY (P.) (Ed.) -
Handbook of Microlithography, Microfabrication and Microsystems, vol 1 & 2, SPEI Press (1997).
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(2) - KRAUSS (P.R.), CHOU (S.Y.) -
J. Vac. Sci. Technol. B 13, p. 2850 (1995).
-
(3)...
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