2. Method classification
2.1 Nanoimprint lithography
A thin layer of thermoplastic polymer (resin) is first applied to a substrate (sample) using a spinner (see figure 2). After heating the mold to a temperature above the polymer's glass transition temperature (Tg), the mold is pressed against the polymer layer with sufficiently high pressure. The system is then cooled and the pressure released. Once the mold has been separated,...
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Method classification
Process analysis
References
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