ABSTRACT
Miniaturization is playing an increasingly important role in the industry of microelectronics and is also used in telecommunications, micro biota and chemistry. This article commences by offering a few definitions and a classification of methods. The method of process analysis (geometrical correlation, rheological aspect, choice of the polymer and finishing of the profile) is provided. The manufacture of molds is then reviewed: pattern writing and engraving, surface treatment and mold duplication. Performance assessments are analyzed through resolution, homogeneity, critical dimension control, precision of positioning, etc.
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INTRODUCTION
Miniaturization is a driving concept that has led the microelectronics industry, over the last twenty years, to increase the integration rate to 100 million transistors per chip, with a minimum feature size close to 100 nm. Miniaturization is also a far-reaching concept. It is playing an increasingly important role in the realization of other types of components used in telecommunications, microrobotics, chemistry, biology and biomedical research.
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