1. Cold plasma
The aim of this first section is to describe the cold plasmas used in PEALD processes. We will give a definition of cold plasmas and the quantities used to characterize them. For a more detailed description, please refer to the article by Anne-Marie Pointu et al in Techniques de l'ingénieur .
1.1 Definition of cold plasma
The term "plasma" was proposed by Langmuir in 1929 to describe an ionized gas. More rigorously, plasma can be defined as a quasi-neutral gas made up of charged particles...
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Cold plasma
PEALD
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