3. Importance of the magnetic field in a magnetron sputtering process
3.1 Presentation of two magnetron configurations
Although briefly mentioned in § 1.1 , the use of a magnetic field is essential for maintaining the discharge at lower working pressures. The configuration of the magnets, in terms of number, size,...
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
Importance of the magnetic field in a magnetron sputtering process
Examples of applications
Bibliography
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
Article included in this offer
"Metal treatments"
(
129 articles
)
Updated and enriched with articles validated by our scientific committees
A set of exclusive tools to complement the resources
