MEMS sensors - measurement techniques | Techniques de l'Ingénieur

Overview

ABSTRACT

The term MEMS (Micro Electro Mechanical System) is used for microsystems based on electrical and mechanical principles. Micro-sensors (or MEMS sensors) are dedicated to the detection or measurement of physical quantities. The different techniques used and their industrial production (or experimental investigation) in the main types of measures, that of pressure, acceleration, angular velocity, current, detection of chemical agents are developed in this article. The development of micro-sensors is geared towards reducing their geometries to observe previously invisible effects, increased performance and reduced consumption, leading to the implementation of sensor networks.

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AUTHORS

Gilles Amendola : Research professor at ESIEE Engineering
Patrick Poulichet : Research professor at ESIEE Engineering
Laure Sevely : Research professor at ESIEE Engineering
Laurie Valbin : Research professor at ESIEE Engineering

INTRODUCTION

After the first article ( [R 430] ) describes the manufacturing technologies, the main effects encountered and the associated electronic processing, the aim of this 2nd article is to describe the techniques used and their industrial (or experimental) realization for the main types of measurement. The methods used to measure pressure, acceleration, angular velocity, current, chemical agent detection, etc. will be developed.

For readers who haven't read [R 430] , we define "microsystems" as microtechnology-based systems that combine mechanical, electrical, optical, chemical and other principles with processing electronics. The term "MEMS" is used for microsystems based on electrical and mechanical principles, and microsensors (or MEMS sensors) are microsystems dedicated to the detection or measurement of physical quantities.

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MEMS sensors - measurement techniques

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Bibliography

(1) - LIU (K.), ZHANG (W.), CHEN (W.), LI (K.), DAI (F.), CUI (F.), WU (X.), MA (G.), XIAO (Q.) - The development of micro-gyroscope technology - Journal of Micromechanics and Microengineering – Volume 19(1), Pages 1-29 (2009).
(2)...

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