Glossary
Comparison of grating characteristic dimensions for AFM and SEM calibration

Nanoscale; Nanoscale

Scale conventionally from 1 nm to 100 nm.

Scanning electron microscopy (SEM) ;Microscope électronique à balayage (MEB)

Electron microscopy technique for obtaining high-resolution images of the sample surface using electron/matter interaction.

Atomic force microscopy (AFM) ;Microscope à force atomique (AFM)

Microscopy technique for obtaining images of a sample's topography by scanning a sharp tip over its surface.

Métrologie ; Metrology

Measurement science defining methods for ensuring confidence in measurement processes.

Measurement uncertainty

Dispersion of values assigned to a measurand based on the information used.

Calibration

Action consisting in establishing a relationship between the values and associated measurement uncertainties provided by standards and the measurements carried out on an instrument.