4. Size measurement by scanning electron microscopy (SEM)
4.1 Principle of SEM measurement
In Scanning Electron Microscopy (SEM), a focused electron beam "illuminates" the sample locally and scans its surface line by line . The interaction between the incident beam and the atoms making up the sample produces several types of signal: secondary electrons, backscattered electrons, Auger electrons or X-rays. Different types of detectors can then be used to collect the various signals...
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
Size measurement by scanning electron microscopy (SEM)
Sample preparation
Bibliography
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
Article included in this offer
"Mechanical and dimensional measurements"
(
126 articles
)
Updated and enriched with articles validated by our scientific committees
A set of exclusive tools to complement the resources
