Glossary
Hybrid metrology AFM/SEM for measuring nanoparticle dimensions

Nanoparticle; Nanoparticle

A nano-object whose three dimensions are on the nano-metric scale.

Nanoscale; Nanoscale

Scale conventionally from 1 nm to 100 nm.

Microscope électronique à balayage; Scanning electron microscopy

Electron microscopy technique for obtaining high-resolution images of the sample surface using electron/matter interaction.

Microscope à force atomique; Atomic force microscopy

Microscopy technique for obtaining images of a sample's topography by sweeping a sharp tip over its surface.

Métrologie ; Metrology

Measurement science defining the methods used to ensure confidence in measurement processes.

Hybrid metrology