Overview
Read this article from a comprehensive knowledge base, updated and supplemented with articles reviewed by scientific committees.
Read the articleAUTHORS
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Sylvain PAINEAU : Marketing and Technology Director
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Philippe ANDREUCCI : Product Marketing Engineer
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Catherine SCHAFFNIT : Technical Marketing Engineer
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Stéphane MAGATON
INTRODUCTION
Microsystems, which emerged in the late 1980s and came onto the market in the 1990s, are currently enjoying a major boom. Microsystems technologies have been identified as the most promising technologies of the twenty-first century, with the potential to revolutionize both the industrial and consumer worlds by combining microelectronics and microfabrication technology.
The following article begins with the design of a microsystem, describes its manufacture and presents the main applications of microsystems: radio-frequency microsystems, optical microsystems and sensors, for example. It complements the following articles in Techniques de l'Ingénieur: "Microsystems".
ref. [37], "Semiconductor sensors"
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EDITIONS
Other editions of this article are available:
- Dec 2025 current edition by Gaëlle LISSORGUES
CAN BE ALSO FOUND IN:
Microsystèmes : applications et mise en œuvre
Definition
- (1) - - http://www.memsnet.org/links/software.html
- (2) - MADOU (M.) - Fundamentals of Microfabrication. - 752 p. 2002 CRC Press.
- (3) - RAI-CHOUDURY...
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