Electron probe X-ray microanalysis - Applications and developments

The electron probe X-ray microanalysis consists in analyzing the characteristic spectrum of X-rays generated in a target by a finely focused electron beam. This article details the main applications of this analysis technique. The purely qualitative chemical analysis, with the acquisition of an X-ray spectrum, allows for an easy detection of major elements, which is not the case for those in low concentrations. The X-ray cartography provides the repartition of the analyzed element. The electron probe X-ray microanalysis takes a step further; the quantification is made possible due to the electron diffusion inside of the target, ionization, and the photoelectric absorption of the generated X ray.