Glow discharge mass spectrometry GDMS

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AUTHORS

Frédéric CHARTIER
Michel TABARANT : Nuclear Energy Division, Physical Chemistry Department, - French Atomic Energy Commission, Saclay

INTRODUCTION

Glow discharges are widely used in industry, particularly in microelectronics, for surface etching and the manufacture of materials through the deposition of thin films and various coatings. They are also used for surface cleaning and pre-treatment.

These glow discharges, which are the subject of this dossier, have also been used as sources of atomization, excitation and ionization in analytical spectrochemistry for some fifty years.

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Glow discharge mass spectrometry GDMS

Glow discharge for analysis

Bibliography

File references

(1) - DUCKWORTH (D.C.), MARCUS (R.K.) - Radio Frequency Powered Glow Discharge Atomization/Ionization Source for Solids Mass Spectrometry. - Anal. Chem., 61, 1879-1886 (1989).
(2) - LEWIS (C.L.), MOSER (M.A.), DALE (D.E.), HANG (W.), HASSELL...

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