Plasma reactors for materials and gas treatment
Cold discharge plasmas - Applications and diagnostics

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D2835 V1 Article

Plasma reactors for materials and gas treatment
Cold discharge plasmas - Applications and diagnostics

Authors : Anne-Marie POINTU, Jérôme PERRIN, Jacques JOLLY

Publication date: November 10, 1997 | Lire en français

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1. Plasma reactors for materials and gas treatment

1.1 Power generators and impedance tuning of discharges

Industrial plasma reactors can be powered by direct current, or alternating current at low, high (radio frequency) or very high (microwave) frequencies. In view of the regulations laid down by the ITU (International Telecommunications Union), the frequencies available for industrial, scientific and medical (ISM) use are limited, as shown in the table 1 .

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