5. Characterization of thin films and microbatteries
5.1 Thickness, mass
Thin film thickness is measured using a mechanical profilometer, or can be deduced from RBS (Rutherford Backscattering Spectroscopy) spectra. Determining the mass is an important step in calculating the mass capacitance of the positive electrode. It is carried out with a precision microbalance (± 0.1 μg).
5.2 Chemical composition
Determining the chemical composition of thin films is often an arduous task, involving several techniques depending on the nature of the elements...
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Characterization of thin films and microbatteries
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