4. Pumping accessories
All pumps can present hazards either to the vacuum quality of the enclosure, or to the outside. The pumps themselves must be protected against the introduction of materials that could damage them. Pump manufacturers have devices in their catalogs which can reduce or eliminate these harmful effects.
4.1 Fog separator
During operation, mechanical pumps emit an oil mist through their discharge ports. This emission occurs when the enclosure is pumped from atmospheric pressure to a pressure of the order of one hectopascal (1 mbar). For example, a 40 m 3 /h pump pumping a 1 m 3 enclosure produces a dense mist filling an 8,000 m 3 ...
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Pumping accessories
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