2. Sensors and actuators
2.1 Physical principles governing microsystems
MEMS-type microsystems can be classified according to their physical transduction principle, i.e., according to the phenomena that enable a measured quantity to be converted into an electrical quantity that can be used by an associated integrated electronic system
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Sensors and actuators
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Standards and norms
- Road vehicles – Functional safety, ISO standard for safety systems in motor vehicles. - ISO 26262 - Décembre 2018
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Examples of commercial MEMS
For industry: accelerometers, gyrometers, microphones, and pressure sensors
ADXL 345 circuit – https://www.analog.com/en/products/adxl345.html
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