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Yong CHEN is a professor at the École normale supérieure in Paris and a researcher at the CNRS Photonics and Nanostructures Laboratory (Marcoussis).

Today, the microelectronics industry uses projection photolithography to produce high-density integrated circuits (figure 1 ). In research laboratories, the use of contact photolithography is more common: first, a thin layer of photosensitive resin is deposited on a substrate, which is then exposed to ultraviolet (UV) radiation...

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(1) - RAI-CHOUDHURY (P.) (Ed.) - Handbook of Microlithography, Microfabrication and Microsystems, vol 1 & 2, SPEI Press (1997).
(2) - KRAUSS (P.R.), CHOU (S.Y.) - J. Vac. Sci. Technol. B 13, p. 2850 (1995).
(3)...

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