Results and discussion
Micro-supercondensateurs à base de films de carbone nanoporeux intégrés sur silicium

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Results and discussion


Micro-supercondensateurs à base de films de carbone nanoporeux intégrés sur silicium

Authors : Kévin BROUSSE, Peihua HUANG, Sébastien PINAUD, Christophe LETHIEN, Barbara DAFFOS, Pierre-Louis TABERNA, Patrice SIMON

Publication date: May 10, 2017 | Lire en français

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3. Results and discussion

3.1 Partial chlorination

A cross-section of the porous SiO 2 (bottom)/TiC (middle)/CDC (top) structure obtained after partial chlorination of the TiC film is proposed figure. 1 b . The CDC film thickness is estimated at 5 μm, leaving an underlayer of the conductive TiC precursor of 1.3 μm. This partial chlorination allows conversion of TiC to CDC without any delamination or cracking, both at the TiC/CDC interface and at the...

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