4. Conclusion

Integrating supercapacitors into electronics is a real challenge, given the limited space available for energy storage on silicon. A process for fabricating highly adherent nanoporous carbon films from carbide-derived carbon has been demonstrated, as has the preparation of wafer-scale micro-supercapacitors. TiC deposition, reactive atmosphere etching for interdigitated patterns and chlorination are processes that are fully compatible with the technologies developed by the silicon industry. CDC films deliver high capacities of 410 F · cm ^–3 /205 mF · cm ^–2 in aqueous electrolytes. These films could be tested in organic media by increasing pore size via higher temperature chlorination