6.
Bulletin MRS (Materials Research Society)
Fabrication of sub-45 nm structures for the next generation of devices.
Vol. 30, n˚ 12, déc. 2005.
RONSE (K.)
Optical lithography – a historical perspective.
C. R. Physique, doi : 10.1016/j.chry.2006.10.007 (2006).
SWITKES (M.)
ROTHSCHILD (M.)
KUNZ (R.R.)
BAEK (S.-Y.)
COLES (D.)
YEUNG (M.)
Immersion lithography : Beyond the 65 nm node with optics.
Microlithography World, p. 4, mai 2003.
COURJON (D.)
Near-field microscopy and near-field optics.
Imperial College Press, Londre (2003).
NOVOTNY (L.)
HECHT (B.)
Principles of Nanooptics....
Exclusive to subscribers. 97% yet to be discovered!
You do not have access to this resource.
Click here to request your free trial access!
Already subscribed? Log in!
Ongoing reading
References
References
Article included in this offer
"Optics and photonics"
(
203 articles
)
Complete knowledge base
Updated and enriched with articles validated by our scientific committees
Services
A set of exclusive tools to complement the resources
References
Exclusive to subscribers. 97% yet to be discovered!
You do not have access to this resource.
Click here to request your free trial access!
Already subscribed? Log in!