6. Glossary

fluence (or energy fluence)

Energy delivered by the laser per unit area on the target surface. It is generally expressed in J/cm ² , and often estimated using a joulemeter and thermal paper.

excimer laser

A type of ultraviolet laser commonly used in PLD. It is based on an excimer, a dimer that is stable only in the excited state and dissociates in the ground state. The excimer lasers most commonly used in PLD are KrF* at 248 nm and ArF* at 193 nm.

laser-MBE; laser-molecular beam epitaxy

PLD technique generally coupled with an RHEED and operating in ultra-high vacuum, enabling layer-by-layer deposition as with MBE.

RHEED ; reflection high energy electron diffraction

In-situ...