7. Glossary
ALD; Atomic Layer Deposition
Alternating-flow chemical vapor deposition technique, based on self-limiting surface reactions, for fine control of film thickness, composition and specific characteristics (uniformity, conformality).
adsorption; adsorption
Term describing the interaction between a gaseous or liquid species (adsorbate) and a surface (adsorbent). It can be physical (physisorption) or chemical (chemisorption).
ALD window; ALD window
Temperature range in which deposition rate is constant and growth is ALD-like.
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Glossary
Acronyms, notations and symbols
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