1. Definition of cleanliness levels
Before discussing the CO 2 pressure cleaning process, it's essential to address the notion of cleanliness. Surface contamination exists in many forms and is present in different states on the surface of a substrate. Among the most common categories are particles, thin or molecular films, organic or inorganic bodies, ionics, and bacteriological contamination. This list can be extended to metals, chemical compounds (toxic and hazardous), and radioactive or biological particles, encountered in various industrial processes such as semiconductor production, metal machining, the manufacture of polymer objects, the nuclear industry, the pharmaceutical and medical industries, or the food industry.
The most common sources of contamination include :
machining oils and greases ;...
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Definition of cleanliness levels
Dense fluids under pressure
Bibliography
Bibliography
Standards and norms
- Clean rooms and related controlled environments – Part 1: Classification of air particulate cleanliness - ISO 14644-1 - 2015
- Clean rooms and related controlled environments – Part 2: Monitoring the maintenance of cleanroom performance for particulate air cleanliness - ISO 14644-2 - 2000
- Clean rooms and related controlled environments – Part 14: Assessment of equipment suitability for use by determining...
Regulations
Order of 11/20/17 on in-service monitoring of pressure equipment and simple pressure vessels. JO n° 282 of December 3, 2017.
Arrêté du 02/05/02 relatif aux prescriptions générales applicables aux installations classées pour la protection de l'environnement soumises à déclaration sous la rubrique n° 2345 relatives à l'utilisation de solvants pour le nettoyage à sec et le traitement des textiles ou des...
Patents
Method and apparatus for treating a substrate with dense fluid and plasma. US Patent Application 2006/0278254.
Substrate processing apparatus for processing substrate using dense phase gas and sonic waves. PCT WO 2004/045739.
Directory
Manufacturers – Suppliers – Distributors (non-exhaustive list)
Equipment manufacturers :
DFD SA: Dense Fluid Degreasing, France https://www.dense-fluid-degreasing.com/fr/
EXTRATEX, France https://www.extratex-sfi.com/fr/supercritical
...
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