Statistical analysis of local deformation of contact surfaces
Tribology of thin film applied to ohmic contact MEMS micro-relays
Article REF: TRI4700 V1
Statistical analysis of local deformation of contact surfaces
Tribology of thin film applied to ohmic contact MEMS micro-relays

Authors : Brice ARRAZAT, Karim INAL

Publication date: September 10, 2012 | Lire en français

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2. Statistical analysis of local deformation of contact surfaces

After deposition of the thin films, the contact surfaces are rough. They are composed of a multitude of asperities (figure 6 ) with different radii of curvature r and heights z. One of the first quantified studies of the evolution of contact surface morphology in ohmic MEMS microrelays was carried out by Gregori and Clarke ...

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