Ohmic MEMS microrelays
Tribology of thin film applied to ohmic contact MEMS micro-relays

Article REF: TRI4700 V1

Ohmic MEMS microrelays
Tribology of thin film applied to ohmic contact MEMS micro-relays

Authors : Brice ARRAZAT, Karim INAL

Publication date: September 10, 2012 | Lire en français

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1. Ohmic MEMS microrelays

1.1 Benefits of ohmic MEMS microrelays

The first ohmic MEMS microrelay consists of a moving part (SiO ₂ silicon oxide cantilever) and gold contacts (figure 1 ). A 300 nm-thick gold thin film (Thin Au - figure 1...

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Bibliography

(1) - PETERSEN (K. E.) - Micromechanical membrane switches on silicon, IBM J. Res. Dev. - vol. 23, pp. 376-385, July 1979.
(2) - COUTU (R. A.), KLADITIS (P. E.), STARMAN (L. A.), REID (J. R.) - A comparison of micro-switch analytic, finite element,...

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