Article | REF: E2000 V2

Thin film technology for RF filters

Authors: Ausrine BARTASYTE, Paul MURALT

Publication date: May 10, 2025 | Lire en français

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6. Glossary

Butterworth-Van Dyke equivalent circuit; Circuit équivalent de type Butterworth-Van Dyke

Electronic circuit, consisting of a mechanical resistor, a mechanical capacitor, a mechanical inductance and an electronic capacitor, used to describe the electromechanical behavior of a piezoelectric device with its electrodes.

Epitaxial thin film; couche mince épitaxiée

Thin layer with well-defined orientation in thickness direction and substrate plane. This type of growth is dependent on the surface structure of the substrate (symmetry and distances between atomic planes). Epitaxial layers can contain growth domains with the same orientation along the surface normal, but with in-plane orientations rotated by the angle defined by the symmetry of the substrate surface. Several film orientations can grow together epitaxially....

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