5. Conclusion

Based on the mechanism of the Auger effect, electron-induced Auger spectroscopy can be implemented in specific equipment with a structure analogous to that of a scanning electron microscope equipped with ultra-high vacuum and an electron analyzer. In local microanalysis, the incident electron probe is focused on the detail to be analyzed, making it possible to identify the elements (except H and He) making up the very first atomic layers (a few nanometers) of the solid surface, with a lateral resolution that can reach a few nanometers, a minimum detectable concentration of the order of 1 ‰ and a detection limit of a few dozen or fewer identical atoms, while precision on concentrations can reach 5% at/at, especially when protocols suggested by ISO standards (which are the result of international cooperation: VAMAS program) are followed.

Linked to the excellent lateral...