Overview
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Jacques CAZAUX: Professor Emeritus at the University of Reims
INTRODUCTION
After acquiring an Auger spectrum in a fixed probe (see [ ]), the mapping of an element can be easily obtained by measuring the evolution of the intensity of the corresponding Auger line during the scanning of the sample surface by the incident electron probe, while the depth profile is obtained, with a fixed probe, by following this same evolution during the ionic erosion of the surface.
With X-ray photoelectron spectroscopy (XPS) or electron spectroscopy for chemical analysis (ESCA) and secondary ion mass spectroscopy (SIMS), electron-induced Auger spectromicroscopy (a combination of spectroscopy, generally referred to by the acronym e – AES for "electron-induced Auger electron spectroscopy," and Auger microscopy, generally referred to as SAM for "scanning Auger electron microscopy") is one of the three preferred techniques for elemental analysis of surfaces and interfaces.
Combined with its high surface sensitivity, its specific character lies primarily in its excellent lateral resolution, which allows it to analyze objects of micrometric or even nanometric size. In addition to its potential applications in various fields of nanotechnology, its primary applications are in the microelectronics industry (analysis and control of highly integrated circuits), metallurgy (for grain boundary composition), mechanics and surface treatment, and even catalysis (for spot analysis of dispersed catalysts), as well as in research and application laboratories for metal multilayers.
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Auger spectroscopy
Mapping and in-depth analysis
Bibliography
References
Standardization
- Analyse chimique des surfaces - Comité technique ISO/TC 201 -
- Chemical analysis of surfaces – Thickness profiling by bombardment – Optimization using single- or multi-layer systems as reference materials - ISO 14606:2000 - 10-00
- Chemical analysis of surfaces – Information protocols - ISO 14975:2000 - 12-00
- Chemical analysis of surfaces – Protocol for data transfer - ISO 14976:1998 - 7-98
- Chemical...
Databases and software
See also the manufacturers' websites.
Surface and Nano-analysis Basics, NPL
http://www.npl.co.uk/nanoanalysis/surfanalbasics.html#aes
NPL Auger Electron Spectrometer Intensity Calibration Software
Organizations
Versailles Project on Advanced Materials and Standards (VAMAS)
ASTM International, Surface and Analysis (Committee 42)
National Institute of Standards and Technology (NIST), Surface and Microanalysis...
Manufacturers, builders
(non-exhaustive list)
There are a significant number of accessory manufacturers (electron and ion guns, analyzers, UV chambers, etc.) that are not mentioned here. The same applies to companies supplying ESCA, mixed ESCA-Auger, or LEED-Auger spectroscopy equipment (and not specifically Auger-SAM). The following list is therefore not exhaustive.
JEOL
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