Proof body
Usual pressures in fluids - Sensors and Transmitters (Part 1)
Article REF: R2042 V2
Proof body
Usual pressures in fluids - Sensors and Transmitters (Part 1)

Author : Christian RIBREAU

Publication date: March 10, 2011 | Lire en français

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1. Proof body

Box 1 – A few technological milestones

  • Bonded metal gauges: 1954

  • Semiconductor gauges: 1954

  • LVDT inductive sensor: 1960

  • Semiconductor gauges diffused in the silicon membrane: 1960

  • Thin-film gauges: 1968

  • Capacitive sensor: 1974

  • Gauges deposited in thick layers: 1975

  • Micromachined silicon chip: 1980

  • Vibrating quartz: 1983

  • Fieldbus: 1990

  • MEMS/MOMS: 2000

  • Radio links/network interconnection: 2007

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