1. Proof body
Box 1 – A few technological milestones
Bonded metal gauges: 1954
Semiconductor gauges: 1954
LVDT inductive sensor: 1960
Semiconductor gauges diffused in the silicon membrane: 1960
Thin-film gauges: 1968
Capacitive sensor: 1974
Gauges deposited in thick layers: 1975
Micromachined silicon chip: 1980
Vibrating quartz: 1983
Fieldbus: 1990
MEMS/MOMS: 2000
Radio links/network interconnection: 2007
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Bibliography
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(1) - BLASQUEZ (G.) et al -
Static response of miniature capacitive pressure sensors with square and rectangular diaphragm
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Revue de Physique Appliquée, 22, p. 505-510 (1987).
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(2) - TIMOSHENKO (S.), WOINOVSKY-KRIEGER (S.) -
Theory of plates and shells...
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+ More than 10,000 articles and 1,000 how-to sheets, over 800 new or updated articles every year
From design to prototyping, right through to industrialization, the reference for securing the development of your industrial projects
From detection principle to sensor and transmitter
