4. Manufacturing technologies

The implementation of metal oxide gas sensors dates back to the 1960s with the work of Taguchi followed by commercialization in 1968 by Figaro Engineering Inc. These early sensors consisted of a heating filament (required for chemisorption activation) embedded in sintered oxide powders of ZnO, then SnO ₂ .

With the development of new microelectronics technologies in the 1980s, gas sensors were built on silicon-based micromachined platforms. Numerous research teams worldwide have worked on optimizing these "heating platforms", as well as on the synthesis...