Measurement principle
Ellipsometry - Theory
Article REF: R6490 V1
Measurement principle
Ellipsometry - Theory

Authors : Frank BERNOUX, Jean-Philippe PIEL, Bernard CASTELLON, Christophe DEFRANOUX, Jean-Hervé LECAT, Pierre BOHER, Jean-Louis STEHLÉ

Publication date: June 10, 2003 | Lire en français

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1. Measurement principle

Consider a plane wave arriving on a flat surface. Part of the wave is transmitted or absorbed through the surface, while another part is reflected by the surface (figure 1 ).

Note :

Please refer to [1] as well as to [43][44] in Techniques de l'Ingénieur.

The electric field Ei→ of the incident wave can...

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