4. Glossary

PE ALD; plasma enhanced atomic layer deposition

Plasma-assisted atomic layer deposition.

CVD; chemical vapor deposition

Chemical vapor deposition.

OES; optical emission spectroscopy

Optical emission spectroscopy is used to identify radiatively de-excited species in plasma.

ICP; inductively coupled plasma

Reactor using an inductive source to create the plasma discharge.

TEM; transmission electron microscopy

Transmission electron microscopy (TEM) is a chemical characterization and imaging technique based on the passage of an electron beam through a thin sample.

XRD; X-Ray diffraction

X-ray diffraction is a method of analysis...