3. From FDSOI to emerging, quasi-SOI and hybrid technologies
Multi-gate devices with tunneling between source, channel and
drain (TFET), making it possible to obtain low inversion slopes of
less than 60 mV
I
/
I
decade, are of interest for very low voltage/consumption
circuits which represent the greatest challenge for future generations
of nanoelectronic devices. Figure
14
shows an example of silicon TFET, fabricated
with opposite source and drain dopings, whose performance in the ON
state is greatly improved using two gates, a thin Si layer and a high
permittivity gate dielectric.
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From FDSOI to emerging, quasi-SOI and hybrid technologies