Microcapacitors and microsupercapacitors
ALD for the electrochemical stockage of energy

Like lithium microbatteries, microcapacitors and microsupercapacitors are designed to be fabricated directly on substrates for integration into miniaturized devices (medical, IoT, etc.). The main challenge for these microsources is to maximize the effective surface area of the substrate. This large effective surface area is achieved in porous carbon or silicon substrates, in nanotube forests, or through microstructuring of silicon. Figure9 shows a Ragone diagram illustrating the energy and power densities, as well as the order of magnitude of the discharge time, for micro-energy storage devices.