1. Chemistry and physics at nanoscopic and microscopic scales
In this section, we will briefly examine the chemical and physical conditions that need to be achieved at the atomic scale (dimensions of a few nanometers) and microscopic scale (dimensions of a few micrometers) in a reactor, which typically has dimensions ranging from millimeters to meters in order to achieve an ALD deposit. This aspect is covered in greater detail in several recent articles
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
Chemistry and physics at nanoscopic and microscopic scales
Performance metrics
Bibliography
Exclusive to subscribers. 97% yet to be discovered!
Already subscribed? Log in!
Article included in this offer
"Technological innovations"
(
196 articles
)
Updated and enriched with articles validated by our scientific committees
A set of exclusive tools to complement the resources
