Application examples
ALD Reactors

The flexibility of the ALD technique and its applicability to a large number of substrate types has led to a wide variety of ALD reactors, suitable for deposition on substrates with a wide range of sizes and shapes.

In the laboratory environment, where small samples with centimeter-scale dimensions need to be processed, user-built machines or simple commercial R&D machines are used (see for example ). A recent development is the use of...