Performance metrics
ALD Reactors

The first factor to consider is the choice of precursors and the range of deposition temperatures that are targeted. Most modern reactors can handle a large number of precursor chemistry compositions. The use of a certain chemistry can, however, have an impact on the details of reactor implementation. For example, the use of halogen precursors (e.g. TiCl₄) can generate reactive corrosion products (e.g. HCl) that can attack certain reactor materials (e.g. aluminum walls) and active components such as gauges and pumps. In addition,...