Glossary
Atomic Layer Deposition (ALD)

ALD; ALD (Atomic Layer Deposition)

An alternating-flow chemical vapor deposition technique based on self-limiting surface reactions. This allows for precise control of film thickness and composition, and enables the achievement of specific characteristics (uniformity, conformality).

Adsorption; adsorption

A term describing the interaction between a gaseous or liquid species (adsorbate) and a surface (adsorbent). It can be physical (physisorption) or chemical (chemisorption).

ALD window; ALD window

The temperature range within which the deposition rate is constant and growth occurs via the ALD mechanism.