4. Key Steps in Developing an ALD Process
To assist with the implementation of an ALD process, the table at 1 details the key steps, their challenges, and the essential resources.
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Key Steps in Developing an ALD Process
Key Steps in Developing an ALD Process
Conclusion
Bibliography
- (1) - PARSON (G.N.), ELAM (J.W.), GEORGE (S.M.), HAUKKA (S.), HYEONGTAG (J.), KESSELS (E.W.M.M.), LESKELA (M.), POODT (P.), RITALA (M.), ROSSNAGEL (S.M.) - History of atomic layer deposition and its relationship with the American Vacuum Society. - Journal of Vacuum Science & Technology A, 31, 050818...
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