Materials, Environmental Impact, and Advances in ALD
Atomic Layer Deposition (ALD)

A wide range of materials is now accessible via ALD. In this section, we provide a non-exhaustive list: since new processes are constantly being developed, this list is inherently outdated. Professor Erwin Kessels and his research team are overseeing a literature review to present all accessible materials color-coded according to the nature of the compound produced, in the form of the periodic table. The versions updated in 2015 and 2025 are shown in the figure at8.