Reference oscillator microsystems
Application of the MEMs to electric metrology

Several microsystem technologies can be used to produce resonators in the frequency range from a few kilohertz up to several gigahertz. Relevant technologies include surface acoustic waves (SAW) and bulk acoustic waves (BAW), as well as micromachining of silicon resonators. All these technologies can be used to produce miniaturized reference oscillators. The telecommunications industry is the driving force in this field. BAW technology has already been industrialized for the manufacture of radio frequency filters for cell phones. According to market studies and forecasts, the second most important microsystem component on the RF market will be a microsystem resonator used as a reference oscillator, replacing the quartz resonator currently in use. Several companies, such as Discera, SiTime and VTI Technologies, are trying to open up the market to microsystem-based oscillators.