3. Protocols
3.1 Two-phase protocol
The comparison was carried out in several stages for the participant (figure 5). The first step was to measure the two networks (P900H60 and VLSI) to determine their dimensional characteristics.
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Protocols
Results
Bibliography
- (1) - SEPPÄ (J.), KORPELAINEN (V.), BERGSTRAND (S.), KARLSSON (H.), LILLEPEA (L.), LASSILA (A.) - Intercomparison of lateral scales of scanning electron microscopes and atomic force microscopes in research institutes in Northern Europe. - Meas. Sci. Technol., vol. 25, n° 4, DOI: 10.1088/0957-0233/25/4/044013 (2014).
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