1. Proof body
Box 1 – A few technological milestones
Bonded metal gauges: 1954
Semiconductor gauges: 1954
LVDT inductive sensor: 1960
Semiconductor gauges diffused in the silicon membrane: 1960
Thin-film gauges: 1968
Capacitive sensor: 1974
Gauges deposited in thick layers: 1975
Micromachined silicon chip: 1980
Vibrating quartz: 1983
Fieldbus: 1990
MEMS/MOMS: 2000
Radio links/network interconnection: 2007
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Proof body
Bibliography
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(1) - BLASQUEZ (G.) et al -
Static response of miniature capacitive pressure sensors with square and rectangular diaphragm
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Revue de Physique Appliquée, 22, p. 505-510 (1987).
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(2) - TIMOSHENKO (S.), WOINOVSKY-KRIEGER (S.) -...
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