1. Definitions
Yong CHEN is a professor at the École normale supérieure in Paris and a researcher at the CNRS Photonics and Nanostructures Laboratory (Marcoussis).
Today, the microelectronics industry uses projection photolithography to produce high-density integrated circuits (figure 1). In research laboratories, the use of contact photolithography is more common: first, a thin layer of photosensitive resin is deposited on a substrate, which is then exposed to ultraviolet (UV) radiation through an optical mask on which the circuit to be engraved is...
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