5. Measuring surface contamination

In the vacuum system, there are two types of contamination, depending on requirements:

• contamination by the gaseous atmosphere, which is accessible through residual gas analysis;

• surface contamination caused by physico-chemical treatments, which can be accessed using surface analysis techniques (Auger spectroscopy, S.E.M. Scanning Electron Microscope - X.P.S. Xray Photoelectron Spectroscopy); all these techniques can be used to measure the cleanliness of an enclosure