Vacuum quality. Vacuum contamination
Vacuum nature and quality - Contamination
Article REF: BM4040 V1
Vacuum quality. Vacuum contamination
Vacuum nature and quality - Contamination

Author : Jean LECLERC

Publication date: October 10, 1997 | Lire en français

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3. Vacuum quality. Vacuum contamination

We saw in 2 that many chemical species are present in a vacuum chamber at concentration or molecular density levels related to total pressure. Remember that total pressure is equal to the sum of partial pressures, so in a chamber we have : ptotale =pH2O+pCO+pCO2+pH2+pCH4+pdivers 

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