Silicon
Micro-machining of single-crystal materials
Article REF: BM7290 V1
Silicon
Micro-machining of single-crystal materials

Author : Jean-Sébastien DANEL

Publication date: July 10, 1998 | Lire en français

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2. Silicon

2.1 Introduction

As we saw in 1.1 , just as silicon revolutionized electronics, it is now changing the way we think about miniature mechanical devices, giving rise to the concept of micromechanics.

In the case of silicon, micromechanical components can be combined or interfaced with microelectronic...

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