7. Glossary

ALD; Atomic Layer Deposition

Alternating-flow chemical vapor deposition technique, based on self-limiting surface reactions, for fine control of film thickness, composition and specific characteristics (uniformity, conformality).

adsorption; adsorption

Term describing the interaction between a gaseous or liquid species (adsorbate) and a surface (adsorbent). It can be physical (physisorption) or chemical (chemisorption).

ALD window; ALD window

Temperature range in which deposition rate is constant and growth is ALD-like.