ALD process
Atomic Layer Deposition (ALD)
Research and innovation REF: RE253 V1
ALD process
Atomic Layer Deposition (ALD)

Authors : Nathanaelle SCHNEIDER, Frédérique DONSANTI

Publication date: October 10, 2016 | Lire en français

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3. ALD process

The ALD process is described here in its entirety, i.e. its key features (ALD cycle, chemical deposition, surface reactions, effect of temperature, number of cycles, program, etc.), as well as its development

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